Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition
Author:
Affiliation:
1. Department of Physics, Chemistry and Biology, Linköping University, Linköping SE58183, Sweden
2. Department of Molecular Sciences, Swedish University of Agricultural Sciences, P.O. Box 7015, Uppsala75007, Sweden
Funder
Vetenskapsr?det
Link?pings Universitet
Knut och Alice Wallenbergs Stiftelse
Stiftelsen f?r?Strategisk Forskning
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.inorgchem.2c03071
Reference56 articles.
1. Chemical Etching and Patterning of Copper, Silver, and Gold Films at Low Temperatures
2. An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure
3. Thermal Atomic Layer Deposition of Continuous and Highly Conducting Gold Thin Films
4. Trends in Copper Precursor Development for CVD and ALD Applications
5. Thermally Robust Gold and Silver Iminopyrrolidinates for Chemical Vapor Deposition of Metal Films
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1. Syntheses and Characterization of Ti(III)/Ti(IV) Triazenido Complexes;Zeitschrift für anorganische und allgemeine Chemie;2024-01-08
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