Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification-Reference-Cited by-同舟云学术

Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

Published:2021 Issue:4 Volume:50 Page:1224-1232
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Santo Domingo Peñaranda Juan¹²³⁴⁵^ORCID,Nisula Mikko¹²³⁴⁵^ORCID,Vandenbroucke Sofie S. T.¹²³⁴⁵^ORCID,Minjauw Matthias M.¹²³⁴⁵,Li Jin¹²³⁴⁵^ORCID,Werbrouck Andreas¹²³⁴⁵,Keukelier Jonas¹²³⁴⁵^ORCID,Pitillas Martínez Andrea I.¹²³⁴⁵^ORCID,Dendooven Jolien¹²³⁴⁵^ORCID,Detavernier Christophe¹²³⁴⁵

Affiliation:

1. Department of Solid State Sciences

2. CoCooN research group

3. Ghent University

4. 9000 Gent

5. Belgium

Abstract

Alucones are one of the best-known films in the Molecular Layer Deposition (MLD) field. In this work, we prove that alucone/Al₂O₃ nanolaminate synthesis can be successfully performed by alternating alucone MLD growth with static O₂ plasma exposures.

Funder

Bijzonder Onderzoeksfonds

H2020 Marie Skłodowska-Curie Actions

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2021/DT/D0DT03896B

Reference46 articles.

1. Atomic Layer Deposition: An Overview

2. Tailoring nanoporous materials by atomic layer deposition