Toposelective vapor deposition of hybrid and inorganic materials inside nanocavities by polymeric templating and vapor phase infiltration-Reference-Cited by-同舟云学术

Toposelective vapor deposition of hybrid and inorganic materials inside nanocavities by polymeric templating and vapor phase infiltration

Published:2022 Issue:19 Volume:4 Page:4102-4113
ISSN:2516-0230
Container-title:Nanoscale Advances
language:en
Short-container-title:Nanoscale Adv.

Author:

Lovikka Ville A.¹^ORCID,Airola Konsta¹^ORCID,McGuinness Emily²^ORCID,Zhang Chao¹^ORCID,Vehkamäki Marko¹^ORCID,Kemell Marianna¹^ORCID,Losego Mark²^ORCID,Ritala Mikko¹^ORCID,Leskelä Markku¹^ORCID

Affiliation:

1. Department of Chemistry, University of Helsinki, A.I. Virtasen Aukio 1, P.O. Box 55, FI-00014 Helsinki, Finland

2. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA

Abstract

The paper presents a nanoselective all-vapor workflow for depositing hybrid and inorganic materials inside nano- and micro-scaled cavities.

Funder

Finnish Centre of Excellence in Atomic Layer Deposition

National Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

General Engineering,General Materials Science,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering

Link

http://pubs.rsc.org/en/content/articlepdf/2022/NA/D2NA00291D

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