New strategies for conformal, superconformal, and ultrasmooth films by low temperature chemical vapor deposition
Author:
Affiliation:
1. Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
2. School of Chemical Sciences, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Funder
National Science Foundation
Semiconductor Research Corporation
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/am-pdf/10.1116/6.0000035
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