First-principles study of coadsorption of Cu2+ and Cl− ions on the Cu (110) surface
Author:
Affiliation:
1. Institute of High Performance Computing
2. Agency for Science
3. Technology and Research (A*STAR)
4. Singapore 138632
5. Singapore
Abstract
Free energy of adsorption for the most stable phases predicted by DFT calculations as a function of electrode potential.
Funder
Agency for Science, Technology and Research
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2020/RA/C9RA10072E
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1. Damascene copper electroplating for chip interconnections
2. The chemistry of additives in damascene copper plating
3. Superconformal film growth: Mechanism and quantification
4. A Superfilling Model that Predicts Bump Formation
5. Theory of Filling of High-Aspect Ratio Trenches and Vias in Presence of Additives
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