Superconformal film growth: Mechanism and quantification-Reference-Cited by-同舟云学术

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Superconformal film growth: Mechanism and quantification

Published:2005-01 Issue:1 Volume:49 Page:19-36
ISSN:0018-8646
Container-title:IBM Journal of Research and Development
language:
Short-container-title:IBM J. Res. & Dev.

Author:

Moffat T. P.,Wheeler D.,Edelstein M. D.,Josell D.

Publisher

IBM

Subject

General Computer Science

Link

http://xplorestaging.ieee.org/ielx5/5288520/5388850/05388856.pdf?arnumber=5388856

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