Influence of reactive oxygen species concentration and ambient temperature on the evolution of chemical bonds during plasma cleaning: a molecular dynamics simulation

Author:

Li Yuhai12ORCID,Jiang Yilan2,Liu Xujie1,Bai Qingshun1ORCID,Liu Hao2,Wang Jingxuan2,Zhang Peng13,Lu Lihua1,Yuan Xiaodong2

Affiliation:

1. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, China

2. Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China

3. Chongqing Research Institute, Harbin Institute of Technology, Chongqing 401135, China

Abstract

The increased reaction species concentration and ambient temperature improved plasma cleaning ability

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Reference47 articles.

1. Atmospheric pressure non-equilibrium plasma cleaning of 19th century daguerreotypes

2. Plasma Treatment in Textile Industry

3. In situ plasma cleaning of large-aperture optical components in ICF

4. J. A.Pryatel , W. H.Gourdin , S. C.Frieders , G. S.Ruble and M. V.Monticelli , Laser-Induced Damage in Optical Materials: 2014 , 2014 , vol. 9237 , p. 92372H

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