Elucidating the surface damage behavior of sol-gel silica anti-reflective films during low-pressure plasma cleaning

Author:

Li Yuhai,Liu Xujie,Jiang Yilan,Zhou Guorui,Yuan Qiang,Yuan Xiaodong,Wang Fang,Sun Laixi,Lu Lihua,Zhang Peng,Bai Qingshun

Publisher

SPIE

Reference15 articles.

1. Cleaning practices and facilities for the National Ignition Facility (NIF);Pryatel,2014

2. Surface contaminant control technologies to improve laser damage resistance of optics;Cheng;Adv. Cond. Matter. Phys. Papers,2014

3. Cleanliness for the NIF 1ω Laser Amplifiers

4. Influence of oil contamination on the optical performance and laser induced damage of fused silica

5. Impact of organic contamination on 1064-nm laser-induced damage threshold of dielectric mirrors;Pereira,2007

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