Effective surface diffusion of nickel on single crystal β-Ga2O3for Schottky barrier modulation and high thermal stability

Author:

Kim Hojoong1234,Kyoung Sinsu564,Kang Taiyoung564,Kwon Jang-Yeon7894ORCID,Kim Kyung Hwan1011124,Rim You Seung1234ORCID

Affiliation:

1. School of Intelligent Mechatronics Engineering

2. Sejong University

3. Seoul 05006

4. Republic of Korea

5. Research and Development, Powercubesemi Inc.

6. Gyeonggi-do 13449

7. School of Integrated Technology and Yonsei Institute of Convergence Technology

8. Yonsei University

9. Incheon 21983

10. Department of Electrical Engineering

11. Gachon University

12. Gyeonggi-do 13120

Abstract

β-Ga2O3Schottky barrier diodes (SBDs) were demonstrated with Ni Schottky contact deposited by the confined magnetic field-based sputtering (CMFS) method.

Funder

National Research Foundation of Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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