The co-reactant role during plasma enhanced atomic layer deposition of palladium
Author:
Affiliation:
1. Department of Solid State Sciences
2. COCOON Research Group
3. Ghent University
4. 9000 Ghent
5. Belgium
6. Laboratory for Chemical Technology
7. B-9052 Ghent
8. Physics Department
9. University of Jyväskylä
10. Finland
Abstract
A thorough investigation on the role of hydrogen, carbon and oxygen surface species during palladium atomic layer deposition process.
Funder
Fonds Wetenschappelijk Onderzoek
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2020/CP/D0CP00786B
Reference60 articles.
1. Atomic Layer Deposition: An Overview
2. A brief review of atomic layer deposition: from fundamentals to applications
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4. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
5. Atomic Layer Deposition of Noble Metals and Their Oxides
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