Low-toxicity chemical solution deposition of ferroelectric Ca:HfO<sub>2</sub>-Reference-Cited by-同舟云学术

Low-toxicity chemical solution deposition of ferroelectric Ca:HfO₂

Published:2023 Issue:3 Volume:11 Page:1119-1133
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Badillo Miguel¹²^ORCID,Taleb Sepide¹^ORCID,Mokabber Taraneh¹^ORCID,Rieck Jan²,Castanedo Rebeca³^ORCID,Torres Gerardo³^ORCID,Noheda Beatriz²^ORCID,Acuautla Mónica¹^ORCID

Affiliation:

1. Engineering and Technology Institute Groningen (ENTEG), Faculty of Science and Engineering, University of Groningen, Nijenborgh 4, Groningen 9747AG, The Netherlands

2. Zernike Institute for Advanced Materials (ZIAM), Faculty of Science and Engineering, University of Groningen, Nijenborgh 4, Groningen 9747AG, The Netherlands

3. Centro de Investigación y de Estudios Avanzados del I.P.N. (CINVESTAV), Unidad Querétaro, 76230, Querétaro, Mexico

Abstract

Simple, stable, and low-toxicity chemical solution for deposition of ferroelectric Ca:HfO2 films.

Funder

Consejo Nacional de Ciencia y Tecnología

Rijksuniversiteit Groningen

H2020 Marie Skłodowska-Curie Actions

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2023/TC/D2TC04182K

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1. Recent progress on defect-engineering in ferroelectric HfO₂: The next step forward via multiscale structural optimization;Materials Horizons;2024

2. Roadmap on ferroelectric hafnia- and zirconia-based materials and devices;APL Materials;2023-08-01

3. Synthesis and Fabrication of Hafnium Zirconium Oxide (HZO) /P(VDF-TrFE) Flexible Piezoelectric Composite Films;2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF);2023-07-23

4. Lessons from hafnium dioxide-based ferroelectrics;Nature Materials;2023-05