Experimental determination of ruthenium L-shell fluorescence yields and Coster–Kronig transition probabilities
Author:
Affiliation:
1. Physikalisch-Technische Bundesanstalt, Abbestr, 2-12, 10587 Berlin, Germany
Abstract
Funder
Horizon 2020 Framework Programme
Electronic Components and Systems for European Leadership
Publisher
Royal Society of Chemistry (RSC)
Subject
Spectroscopy,Analytical Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2023/JA/D3JA00085K
Reference31 articles.
1. Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
2. V.Philipsen , K. V.Luong , K.Opsomer , L.Souriau , J.Rip , C.Detavernier , et al., Mask absorber development to enable next-generation EUVL , in Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology , ed. A. Ando , International Society for Optics and Photonics. SPIE , 2019 , vol. 11178 , p. 111780F , 10.1117/12.2537967
3. L. G.Wen , C.Adelmann , O. V.Pedreira , S.Dutta , M.Popovici , B.Briggs , et al., Ruthenium metallization for advanced interconnects , in IEEE International Interconnect Technology Conference/Advanced Metallization Conference , IITC/AMC , 2016 , pp. 34–36
4. Epitaxial metals for interconnects beyond Cu
5. The role of Ru passivation and doping on the barrier and seed layer properties of Ru-modified TaN for copper interconnects
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