Retrieval of the atomic displacements in the crystal from the coherent X-ray diffraction pattern

Abstract

The retrieval of spatially resolved atomic displacements is investigatedviathe phases of the direct(real)-space image reconstructed from the strained crystal's coherent X-ray diffraction pattern. It is demonstrated that limiting the spatial variation of the first- and second-order spatial displacement derivatives improves convergence of the iterative phase-retrieval algorithm for displacements reconstructions to the true solution. This approach is exploited to retrieve the displacement in a periodic array of silicon lines isolated by silicon dioxide filled trenches.