Modular deposition chamber forin situX-ray experiments during RF and DC magnetron sputtering-Reference-Cited by-同舟云学术

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Modular deposition chamber forin situX-ray experiments during RF and DC magnetron sputtering

Published:2012-01-06 Issue:2 Volume:19 Page:216-222
ISSN:0909-0495
Container-title:Journal of Synchrotron Radiation
language:
Short-container-title:J Synchrotron Radiat

Author:

Krause Bärbel,Darma Susan,Kaufholz Marthe,Gräfe Hans-Hellmuth,Ulrich Sven,Mantilla Miguel,Weigel Ralf,Rembold Steffen,Baumbach Tilo

Publisher

International Union of Crystallography (IUCr)

Subject

Instrumentation,Nuclear and High Energy Physics,Radiation

Link

http://journals.iucr.org/s/issues/2012/02/00/vv5031/vv5031.pdf

Reference27 articles.

1. A structure zone diagram including plasma-based deposition and ion etching

2. Observation of the growth mode of TiN during magnetron sputtering using synchrotron radiation

3. Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering

4. In-situ X-ray studies of organometallic vapor phase epitaxy growth

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