Observation of the growth mode of TiN during magnetron sputtering using synchrotron radiation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1459749
Reference13 articles.
1. Structure and properties of TiN coatings
2. The surface morphology of a growing crystal studied by thermal energy atom scattering (TEAS)
3. Dynamic effects in RHEED from MBE grown GaAs(001) surfaces
4. Dynamics of film growth of GaAs by MBE from Rheed observations
5. Molecular-beam epitaxy of gallium nitride on (0001) sapphire substrates using ammonia
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1. Synchrotron-Based Capabilities for Studying Engineering Materials at PETRA-III;Synchrotron Radiation News;2017-05-04
2. Epitaxial transformation of hcp–fcc Ti sublattices during nitriding processes of evaporated-Ti thin films due to nitrogen-implantation;Journal of Alloys and Compounds;2013-11
3. Characterization of epitaxial transformation phenomena induced by the interaction of implanted N-ions with Ti thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-11
4. Modular deposition chamber forin situX-ray experiments during RF and DC magnetron sputtering;Journal of Synchrotron Radiation;2012-01-06
5. In-situ Observation of Nitriding Processes of Deposited-Ti Thin Films due to Ion Implantation in an Analytical Transmission Electron Microscope;e-Journal of Surface Science and Nanotechnology;2011
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