A structure zone diagram including plasma-based deposition and ion etching
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference39 articles.
1. Handbook of Hard Coatings;Hultman,2001
2. Fundamental structure forming phenomena of polycrystalline films and the structure zone models
3. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
4. Handbook of Deposition Technologies for Films and Coatings;Greene,1994
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