Electrical properties and thermal stability in stack structure of HfO2/Al2O3/InSb by atomic layer deposition

Author:

Baik Min,Kang Hang-Kyu,Kang Yu-Seon,Jeong Kwang-SikORCID,An Youngseo,Choi Seongheum,Kim Hyoungsub,Song Jin-Dong,Cho Mann-Ho

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Reference29 articles.

1. David, E. & Kotecki. A review of high dielectric materials for DRAM capacitors, Integrated Ferroelectrics. 16, 1–19 (1997).

2. Suzuki, R. et al. 1-nm-Capacitance-Equivalent-Thickness HfO2/Al2O3/InGaAs Metal-Oxide Semiconductor Structure with Low Interface Trap Density and Low Gate Leakage Current Density. Appl. Phys. Lett. 100, 132906 (2012).

3. Kang, Y.-S. et al. Thickness dependence on crystalline structure and interfacial reactions in HfO2 films on InP (001) grown by atomic layer deposition. Appl. Phys. Lett. 97, 172108 (2010).

4. Kang, Y.-S. et al. Interfacial reactions between HfO2 films prepared by atomic layer deposition and an InP substrate using postnitridation with NH3 vapor. Electrochemical and Solid-state letters. 15(4), G9–G11 (2012).

5. Zhang, S. B. & Northerup, J. E. Chemical potential dependence of defect formation energies in GaAs: Application to Ga self-diffusion. Phys. Rev. Lett. 67, 2339 (1991).

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