Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring-Reference-Cited by-同舟云学术

Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring

Published:2017-08-22 Issue:1 Volume:7 Page:
ISSN:2045-2322
Container-title:Scientific Reports
language:en
Short-container-title:Sci Rep

Author:

Mino Lorenzo,Bonino Valentina,Agostino Angelo,Prestipino Carmelo,Borfecchia Elisa,Lamberti Carlo^ORCID,Operti Lorenza,Fretto Matteo,De Leo Natascia,Truccato Marco

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

http://www.nature.com/articles/s41598-017-09443-3.pdf

Reference41 articles.

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3. Romanato, F. et al. Fabrication of 3D metallic photonic crystals by X-ray lithography. Microelectron. Eng. 67–8, 479–486, doi: 10.1016/s0167-9317(03)00104-7 (2003).

4. Maldonado, J. R. & Peckerar, M. X-ray lithography: Some history, current status and future prospects. Microelectron. Eng. 161, 87–93, doi: 10.1016/j.mee.2016.03.052 (2016).

5. Cerrina, F. X-ray imaging: applications to patterning and lithography. J. Phys. D-Appl. Phys. 33, R103–R116, doi: 10.1088/0022-3727/33/12/201 (2000).

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