Vertical and bevel-structured SiC etching techniques incorporating different gas mixture plasmas for various microelectronic applications
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-017-04389-y.pdf
Reference39 articles.
1. Cao, L., Li, B. & Zhao, J. H. Etching of SiC using inductively coupled plasma. J. Electrochem. Soc. 145(10), 3609–3612 (1998).
2. Elasser, A. & Chow, T. P. Silicon carbide benefits and advantages for power electronics circuits and systems. Proc. IEEE 90(6), 969–986 (2002).
3. Zhou, Q. et al. GaN/SiC avalanche photodiodes. Appl. Phys. Lett. 99, 131110 (2011).
4. Wang, C., Lee, W. S., Cho, S. J. & Kim, N. Y. SiC backside source grounding process for AlGaN/GaN HEMT by physical dicing method. Electron. Lett. 48(7), 405–406 (2012).
5. Cho, S. J., Wang, C. & Kim, N. Y. Effects of double passivation for optimize DC properties in gamma-gate AlGaN/GaN high electron mobility transistor by plasma enhanced chemical vapor deposition. Thin Solid Films 520(13), 4455 (2012).
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