Spatial mapping of band bending in semiconductor devices using in situ quantum sensors
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://www.nature.com/articles/s41928-018-0130-0.pdf
Reference55 articles.
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3. Simon, J., Protasenko, V., Lian, C., Xing, H. & Jena, D. Polarization-induced hole doping in wide-band-gap uniaxial semiconductor heterostructures. Science 327, 60–64 (2010).
4. Stathis, J. & Zafar, S. The negative bias temperature instability in MOS devices: a review. Microelectron. Reliab. 46, 270–286 (2006).
5. Zhang, P. et al. Electronic transport in nanometre-scale silicon-on-insulator membranes. Nature 439, 703–706 (2006).
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