Abstract
AbstractAcceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms. Herein, we present a synchronized oscillator-based enhancement approach to realize a fivefold resolution improvement of a microelectromechanical resonant accelerometer. Through the unidirectional electrical coupling method, we achieved synchronization of the sensing oscillator of the microelectromechanical resonant accelerometer and an external reading oscillator, which remarkably enhanced the stability of the oscillation system to 19.4 ppb and the resolution of the accelerometer to 1.91 μg. In addition, the narrow synchronization bandwidth of conventional synchronized oscillators was discussed, and hence, we propose a novel frequency automatic tracking system to expand the synchronization bandwidth from 113 to 1246 Hz, which covers the full acceleration measurement range of ±1 g. For the first time, we utilized a unidirectional electrical synchronization mechanism to improve the resolution of resonant sensors. Our comprehensive scheme provides a general and powerful solution for performance enhancement of any microelectromechanical system (MEMS) resonant sensor, thereby enabling a wide spectrum of applications.
Funder
National Science Foundation of China | National Natural Science Foundation of China-Yunnan Joint Fund
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics
Reference25 articles.
1. Zou, X., Thiruvenkatanathan, P. & Seshia, A. A. A seismic-grade resonant MEMS accelerometer. J. Microelectromech. Syst.23, 768–770 (2014).
2. Pinto, D. et al. A small and high sensitivity resonant accelerometer. Procedia Chem.1, 536–539 (2009).
3. Kim, H. C. et al. Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs). InThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2005) 172–175 (Seoul, 2005).
4. Wang, S. et al. A MEMS resonant accelerometer for low-frequency vibration detection. Sens. Actuat. A283, 151–158 (2018).
5. Caspani, A. et al. Compact biaxial micromachined resonant accelerometer. J. Micromech. Microeng.23, 105012 (2013).
Cited by
48 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献