Fabrication and characterization of high-temperature AlN thick-film piezoelectric accelerometer
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Published:2024-09
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ISSN:0272-8842
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Container-title:Ceramics International
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language:en
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Short-container-title:Ceramics International
Author:
Lv Ting,
Pelenovich Vasiliy O.ORCID,
Xu Chang,
Zeng Xiaomei,
Hou DongyangORCID,
Xiong Zechang,
Yang Bing,
Dong Fang,
Liu Sheng