Quantifying squeeze film damping in four-leaf clover-coupled micro-resonators: A comprehensive study under variable vacuum degrees-Reference-Cited by-同舟云学术

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Quantifying squeeze film damping in four-leaf clover-coupled micro-resonators: A comprehensive study under variable vacuum degrees

Published:2024-10 Issue: Volume:376 Page:115584
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ma Shujun,Wang Dengshen,Wang Dezhao,Dang Tingyu,Xue Diyi,Wang Hao

Funder

National Natural Science Foundation of China

Natural Science Foundation of Liaoning Province

Fundamental Research Funds for the Central Universities

National Key Research and Development Program of China

Publisher

Elsevier BV

Reference47 articles.

1. A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam;Alcheikh;Sens. Actuators, A,2021

2. Multiple particle identification by sequential frequency-shift measurement of a micro-plate;Ma;Int. J. Mech. Sci.,2022

3. The kinetic friction between a nanowire and a flat substrate measured using nanomanipulation with optical microscopy;Wang;Appl. Phys. Lett.,2015

4. Effects of residual stress and fluid loading on vibrations of a micro-diaphragm on a free fluid surface;Ma;AIP Adv.,2021

5. Mode dependent fluid damping in pre-stressed micro-diaphragm resonators;Ma;J. Appl. Phys.,2018

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