A MEMS resonant accelerometer for low-frequency vibration detection-Reference-Cited by-同舟云学术

A MEMS resonant accelerometer for low-frequency vibration detection

Published:2018-11 Issue: Volume:283 Page:151-158
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wang Shudong,Wei Xueyong,Zhao Yulong,Jiang Zhuangde,Shen Yajing

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference26 articles.

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3. Surface-micromachined resonant accelerometer;Roessig;IEEE,1997

4. A vacuum packaged surface micromachined resonant accelerometer;Seshia;J. Microelectromech. Syst.,2002

5. A high-resolution resonant MEMS accelerometer;Zou;Transducers, International Conference on Solid-State Sensors, Actuators and Microsystems,2015

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