Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference41 articles.
1. Aluminum-based metallurgy for global interconnects;Pramanik;M.R.S. Bulletin,1995
2. Mechanisms of thermal stress relaxation and stress induced voiding in narrow aluminum based metallizations;Korhonen;J. Appl. Phys.,1991
3. Stress relaxation of passivated aluminum line metallizations on silicon substrates;Korhonen;J. Appl. Phys.,1991
4. X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines;Flinn;J. Appl. Phys.,1991
5. Stress induced nucleation of voids in narrow aluminum-based metallizations on silicon substrates;Korhonen;J. Appl. Phys.,1991
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