Effect of Cosputtering and Sample Rotation on Improving C60+ Depth Profiling of Materials
Author:
Affiliation:
1. Research Center for Applied Science, Academia Sinica, Tapei 115, Taiwan
2. Department of Materials Science and Engineering, Nation Taiwan University, Taipei 106, Taiwan
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac3020824
Reference48 articles.
1. X-ray Photoelectron Spectrometry Depth Profiling of Organic Thin Films Using C60 Sputtering
2. Extremely low sputtering degradation of polytetrafluoroethylene by C60 ion beam applied in XPS analysis
3. Molecular Depth Profiling of Sucrose Films: A Comparative Study of C60n+ Ions and Traditional Cs+ and O2+ Ions
4. The Magic of Cluster SIMS
5. Protocols for Three-Dimensional Molecular Imaging Using Mass Spectrometry
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1. Effect of energy per atom (E/n) on the Ar gas cluster ion beam (Ar-GCIB) and O2+ cosputter process;The Analyst;2019
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3. Rapid label-free determination of ketamine in whole blood using secondary ion mass spectrometry;Talanta;2015-10
4. Effects of the temperature and beam parameters on depth profiles in X-ray photoelectron spectrometry and secondary ion mass spectrometry under C60+–Ar+ cosputtering;Analytica Chimica Acta;2014-12
5. Depth Profiling of Metal Overlayers on Organic Substrates with Cluster SIMS;Analytical Chemistry;2013-10-10
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