1. Advanced Thin Film Technology Division, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany
2. Advanced Electron Microscopy Division, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany
3. CEA, LETI, Univ. Grenoble Alpes, 38000 Grenoble, France
4. CNRS-LTM, CEA, LETI, 38054 Grenoble, France
5. Fraunhofer IMPS, Center Nanoelectronic Technologies (CNT), 01109 Dresden, Germany
6. GSI Helmholtzzentrum fuer Schwerionenforschung, 64291 Darmstadt, Germany
7. Institute of Materials Science, TU Darmstadt, 64287 Darmstadt, Germany