Mesostructured HfxAlyO2 Thin Films as Reliable and Robust Gate Dielectrics with Tunable Dielectric Constants for High-Performance Graphene-Based Transistors
Author:
Affiliation:
1. Device Lab., Device & System Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea
2. School of Electrical Engineering, Korea University, Seoul 136-713, Republic of Korea
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsnano.6b01734
Reference36 articles.
1. One-Dimensional Electrical Contact to a Two-Dimensional Material
2. Van der Waals heterostructures
3. Graphene-Like Two-Dimensional Materials
4. A role for graphene in silicon-based semiconductor devices
5. Graphene transistors
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