Controlling the crystallinity of HfO2 thin film using the surface energy-driven phase stabilization and template effect-Reference-Cited by-同舟云学术

Controlling the crystallinity of HfO2 thin film using the surface energy-driven phase stabilization and template effect

Published:2022-07 Issue: Volume:590 Page:153082
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lee Ae Jin,Kim Byung Seok,Hwang Ji Hyeon,Kim Youngjin,Oh Hansol,Park YongJoo,Jeon Woojin

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference44 articles.

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4. High dielectric constant gate oxides for metal oxide Si transistors, Reports;Robertson;Prog. Phys.,2006

5. Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer;Maeng;Appl. Phys. Lett.,2010

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