Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography
Author:
Affiliation:
1. IBM Research Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
2. SwissLitho AG, Technoparkstrasse 1, 8005 Zurich, Switzerland
3. University of Pittsburgh, Pittsburgh, Pennsylvania 15261, United States
Funder
FP7 Information and Communication Technologies
FP7 Ideas: European Research Council
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
http://pubs.acs.org/doi/pdf/10.1021/acsnano.7b06307
Reference34 articles.
1. Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond
2. Sub-10-nm structures written in ultra-thin HSQ resist layers using electron-beam lithography
3. Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
4. Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si
5. Patterning, Characterization, and Chemical Sensing Applications of Graphene Nanoribbon Arrays Down to 5 nm Using Helium Ion Beam Lithography
Cited by 71 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Tip‐based Lithography with a Sacrificial Layer;Small;2024-01-29
2. Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications;Discover Nano;2023-12-11
3. Generating smooth potential landscapes with thermal scanning-probe lithography;Journal of Physics: Materials;2023-11-30
4. Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning;Microsystems & Nanoengineering;2023-10-10
5. Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates;ACS Applied Nano Materials;2023-10-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3