Plasma Oxidation of Copper: Molecular Dynamics Study with Neural Network Potentials-Reference-Cited by-同舟云学术

Plasma Oxidation of Copper: Molecular Dynamics Study with Neural Network Potentials

Published:2022-12-07 Issue:12 Volume:16 Page:20680-20692
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Xia Yantao¹,Sautet Philippe¹²^ORCID

Affiliation:

1. Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095, United States

2. Department of Chemistry and Biochemistry, University of California, Los Angeles, California 90095, United States

Funder

Division of Chemical, Bioengineering, Environmental, and Transport Systems

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsnano.2c07712

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4. Atomic Layer Etching: An Industry Perspective

5. Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation

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