Huge Piezoelectric Response of LaN-based Superlattices
Author:
Affiliation:
1. Physics Department, Shanghai Key Laboratory of High Temperature Superconductors, State Key Laboratory of Advanced Special Steel, International Centre of Quantum and Molecular Structures, Shanghai University, Shanghai 200444, China
Funder
?sterreichische Forschungsf?rderungsgesellschaft
Science and Technology Commission of Shanghai Municipality
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.0c14969
Reference47 articles.
1. Super-high-frequency two-port AlN contour-mode resonators for RF applications
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3. Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators
4. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
5. Piezoelectric aluminum nitride nanoelectromechanical actuators
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