DNA Origami for Silicon Patterning
Author:
Affiliation:
1. CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
2. CNRS/LTM, Université Grenoble Alpes, F-38000 Grenoble, France
3. CNRS, LTM, F-38000 Grenoble, France
Funder
Commissariat ? l'?nergie Atomique et aux ?nergies Alternatives
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.0c10211
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