Asymmetrically Substituted Tetrahedral Cobalt NHC Complexes and Their Use as ALD as well as Low-Temperature CVD Precursors
Author:
Affiliation:
1. Institut für Anorganische Chemie, Julius-Maximilians-Universität Würzburg, Am Hubland, 97074 Würzburg, Germany
2. Institut für Halbleiter- und Mikrosystemtechnik, Technische Universität Dresden, Helmholtzstrasse 10, 01069 Dresden, Germany
Funder
Julius-Maximilians-Universit?t W?rzburg
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.organomet.8b00060
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