The comprehensive study of thermal properties of tris(2,2,6,6-tetramethyl-3,5-heptanedionato)cobalt(III) related to the chemical vapor deposition of Co-oxide based thin film materials-Reference-Cited by-同舟云学术

The comprehensive study of thermal properties of tris(2,2,6,6-tetramethyl-3,5-heptanedionato)cobalt(III) related to the chemical vapor deposition of Co-oxide based thin film materials

Published:2022-05 Issue: Volume:199 Page:110969
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Dorovskikh S.I.^ORCID,Klyamer D.D.^ORCID,Makarenko A.M.,Zherikova K.V.,Turgambaeva A.E.,Shevtsov Y.V.,Kal'nyi D.B.,Igumenov I.K.,Morozova N.B.

Funder

Ministry of Education and Science of the Russian Federation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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