1. Science and Technology on Monolithic Integrated Circuits
and Modules Laboratory, Nanjing Electronic Device Institute, Nanjing 210016, China
2. Department
of Physics and Key Laboratory of Artificial Micro- and Nano-structures
of Ministry of Education, Wuhan University, Wuhan 430072, China
3. National Laboratory of Solid State Microstructures,
School of Electronic Science and Engineering and Collaborative Innovation
Center of Advanced Microstructures, Nanjing University, Nanjing 210093, P. R. China
4. Shanghai Institute
of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China