Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains-Reference-Cited by-同舟云学术

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Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains

Published:2017-03-08 Issue:11 Volume:9 Page:9849-9861
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Nguyen Minh D.¹²³^ORCID,Houwman Evert P.¹,Dekkers Matthijn²,Rijnders Guus¹

Affiliation:

1. MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, Enschede 7500AE, The Netherlands

2. Solmates B.V., Drienerlolaan 5, Enschede 7522NB, The Netherlands

3. International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, Hanoi 10000, Vietnam

Funder

Materials Innovation Institute

NanoNextNL

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

http://pubs.acs.org/doi/pdf/10.1021/acsami.6b16470

Reference66 articles.

1. Thin-film piezoelectric MEMS

2. PZT-Based Piezoelectric MEMS Technology

3. Synthesis of 10-?m-Thick Lead Zirconate Titanate Films on 2-in. Si Substrates for Piezoelectric Film Devices

4. Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of $\hbox{Pb}(\hbox{Zr}, \hbox{Ti})\hbox{O}_{3}$ Thin Films on Titanium Substrates

5. Recent Progress in Materials Issues for Piezoelectric MEMS

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