Synthesis of 10-?m-Thick Lead Zirconate Titanate Films on 2-in. Si Substrates for Piezoelectric Film Devices
Author:
Publisher
Wiley
Subject
Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1744-7402.2006.02107.x/fullpdf
Reference22 articles.
1. Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick films on silicon substrates
2. Static Characteristics of Piezoelectric Thin Film Buckling Actuator
3. Fabrication and Electrical Properties of Lead Zirconate Titanate Thick Films
4. Piezoelectric properties of c-axis oriented Pb(Zr,Ti)O3 thin films
5. Analysis of Bending Displacement of Lead Zirconate Titanate Thin Film Synthesized by Hydrothermal Method
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1. Sol?Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols;Sensors and Materials;2019-08-19
2. Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators;Journal of Physics: Conference Series;2017-11
3. Mode-matching analysis of a spit-circular cavity resonator for measurement of the dielectric constant for film on a substrate;IEEJ Transactions on Electrical and Electronic Engineering;2017-06
4. Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains;ACS Applied Materials & Interfaces;2017-03-08
5. Fabrication of Multilayer Pb(Zr0.53Ti0.47)O3Film Crystallized by Laser Annealing;Japanese Journal of Applied Physics;2013-09-01
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