PZT-Based Piezoelectric MEMS Technology-Reference-Cited by-同舟云学术

PZT-Based Piezoelectric MEMS Technology

Published:2012-04-25 Issue:6 Volume:95 Page:1777-1792
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J. Am. Ceram. Soc.

Author:

Smith Gabriel L.¹,Pulskamp Jeffrey S.¹,Sanchez Luz M.¹,Potrepka Daniel M.¹,Proie Robert M.¹,Ivanov Tony G.¹,Rudy Ryan Q.¹,Nothwang William D.¹,Bedair Sarah S.¹,Meyer Christopher D.¹,Polcawich Ronald G.¹

Affiliation:

1. Sensors and Electron Devices Directorate; US Army Research Laboratory; Adelphi; Maryland; 20783

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2012.05155.x/fullpdf

Reference63 articles.

1. Additive Processes for Piezoelectric Materials: Piezoelectric MEMS

2. Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting;Muralt;MRS Bull.,2009

3. Piezoelectric MEMS Sensors: State-of-the-Art and Perspectives;Tadigadapa;Meas. Sci. Technol.,2009

4. Recent Progress in Materials Issues for Piezoelectric MEMS;Muralt;J. Am. Ceram. Soc.,2008

5. http://www.ramtron.com/products/nonvolatile-memory/

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