A Study of CVD Growth Kinetics and Film Microstructure of Zirconium Dioxide from Zirconium Tetra-tert-Butoxide
Author:
Affiliation:
1. Departments of Chemistry and Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0107629
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