Surface Morphology of Various Matrixes with Zirconium Oxide Coatings Synthetized by Alternating Pulsing of Zirconium(IV) <i>tert</i>-Butoxide and Water Vapors Treatment of the Surface

Abstract

Zirconium oxide coatings of various thicknesses were synthesized on the surface of plates of monocrystalline silicon and borosilicate glass by alternating pulsing of zirconium(IV) tert-butoxide and water vapors treatment. The effect of the matrix type and the coating thickness on surface morphology of the samples was investigated using atomic force microscopy. The concentrations of zirconium in the synthesis products were determined by X-ray spectral microanalysis and the growth constant of the zirconium oxide film on silicon was evaluated. Assumptions are made about the influence of the type of the matrix on the structure of the surface of the zirconium oxide layer.