Temperature-Controlled Depth Profiling of Poly(methyl methacrylate) Using Cluster Secondary Ion Mass Spectrometry. 1. Investigation of Depth Profile Characteristics
Author:
Affiliation:
1. National Institute of Standards and Technology, 100 Bureau Drive, Mail Stop 8371, Gaithersburg, Maryland 20899-8371
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac061356h
Reference32 articles.
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4. Effectiveness of atomic and polyatomic primary ions for organic secondary ion mass spectrometry
5. A C60 Primary Ion Beam System for Time of Flight Secondary Ion Mass Spectrometry: Its Development and Secondary Ion Yield Characteristics
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