New horizons in sputter depth profiling inorganics with giant gas cluster sources: Niobium oxide thin films-Reference-Cited by-同舟云学术

New horizons in sputter depth profiling inorganics with giant gas cluster sources: Niobium oxide thin films

Author:

Ellsworth Ashley A.¹,Young Christopher N.²,Stickle William F.²,Walker Amy V.¹³^ORCID

Affiliation:

1. Department of Chemistry and Biochemistry; University of Texas at Dallas; 800 W. Campbell Rd Richardson TX 75080 USA

2. Analytical and Development Labs; HP Inc.; 1000 NE Circle Blvd Corvallis OR 97330 USA

3. Department of Materials Science and Engineering; University of Texas at Dallas; 800 W. Campbell Rd Richardson TX 75080 USA

Funder

Division of Chemistry National Science Foundation

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

Reference53 articles.

3. Size effect in cluster collision on solid surfaces;Matsuo;Nucl Instrum Methods Phys Res, Sect B,2007

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