Synthesis and Exploratory Deposition Studies of Isotetrasilane and Reactive Intermediates for Epitaxial Silicon
Author:
Affiliation:
1. Gelest Inc., Morrisville, Pennsylvania 19067, United States
2. SUNY Polytechnic Institute, Albany, New York 12203, United States
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acs.inorgchem.8b02761
Reference29 articles.
1. Free-standing epitaxial silicon thin films for solar cells grown on double porous layers of silicon and electrochemically oxidized porous silicon dioxide
2. Epitaxial growth of cubic silicon carbide on silicon using hot filament chemical vapor deposition
3. Hot-wire chemical vapor deposition of epitaxial film crystal silicon for photovoltaics
4. Influence of Si precursor on Ge segregation during ultrathin Si reduced pressure chemical vapor deposition on Ge
5. High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Challenges in the Synthesis and Processing of Hydrosilanes as Precursors for Silicon Deposition;Chemistry – A European Journal;2024-05-17
2. A perphenylated PSi4P-chain: Synthesis and characterization of 1,4-bis(diphenylphosphanyl)octaphenyl-n-tetrasilane;Journal of Organometallic Chemistry;2023-01
3. The Synthesis of Tris(silyl)silanides Revisited. A Study of Reactivity and Stability;Zeitschrift für anorganische und allgemeine Chemie;2022-05-05
4. Process Steps for High Quality Si-Based Epitaxial Growth at Low Temperature via RPCVD;Materials;2021-07-03
5. Subvalent mixed SixGey oligomers: (Cl3Si)4Ge and Cl2(Me2EtN)SiGe(SiCl3)2;Chemical Communications;2021
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3