Positron Annihilation Techniques Suited for Porosity Characterization of Thin Films
Author:
Affiliation:
1. Department of Physics, Washington State University, Pullman, Washington 99164-2814
2. IBM T.J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp013947b
Reference55 articles.
1. Supramolecular Approaches to Nanoscale Dielectric Foams for Advanced Microelectronic Devices
2. Positronium annihilation in mesoporous thin films
3. Determination of pore-size distribution in low-dielectric thin films
4. Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy
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