DC magnetron sputter deposition in pure helium gas: formation of porous films or gas/solid nanocomposite coatings-Reference-Cited by-同舟云学术

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DC magnetron sputter deposition in pure helium gas: formation of porous films or gas/solid nanocomposite coatings

Published:2024-06 Issue: Volume:224 Page:113184
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Ibrahim Sara,Fernández Asunción^ORCID,Brault Pascal,Sauldubois Audrey,Desgardin Pierre^ORCID,Caillard Amael^ORCID,Hufschmidt Dirk^ORCID,de Haro Maria-Carmen Jiménez,Sauvage Thierry,Barthe Marie-France,Thomann Anne-Lise^ORCID

Publisher

Elsevier BV

Reference61 articles.

1. Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: a joint experimental and modeling study;Dervaux;Thin Solid Films,2017

2. Glancing Angle Deposition of Thin Films: Engineering the Nanoscale;Hawkeye,2014

3. Perspectives on oblique angle deposition of thin ﬁlms: from fundamentals to devices;Barranco;Prog. Mater. Sci.,2016

4. Review Article: tracing the recorded history of thin-film sputter deposition: from the 1800s to 2017;Greene;J. Vac. Sci. Technol. A,2017

5. High power pulsed magnetron sputtering: a review on scientific and engineering state of the art;Sarakinos;Surf. Coating. Technol.,2010

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