Cylindrical Line-Feeding Growth of Free-Standing Silicon Nanohelices as Elastic Springs and Resonators-Reference-Cited by-同舟云学术

Cylindrical Line-Feeding Growth of Free-Standing Silicon Nanohelices as Elastic Springs and Resonators

Published:2020-06-10 Issue:7 Volume:20 Page:5072-5080
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Ma Haiguang¹,Yuan Rongrong¹,Wang Junzhuan¹,Shi Yi¹,Xu Jun¹^ORCID,Chen Kunji¹,Yu Linwei¹^ORCID

Affiliation:

1. National Laboratory of Solid State Microstructures/School of Electronics Science and Engineering/Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, P.R. China

Funder

Ministry of Science and Technology of the People's Republic of China

National Natural Science Foundation of China

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.0c01265

Reference48 articles.

1. Three-dimensional integrated circuits

2. Vertically integrated, three-dimensional nanowire complementary metal-oxide-semiconductor circuits

3. 3D-Transistor Array Based on Horizontally Suspended Silicon Nano-bridges Grown via a Bottom-Up Technique

4. Top–Down Fabrication of Gate-All-Around Vertically Stacked Silicon Nanowire FETs With Controllable Polarity

5. Realization of a Silicon Nanowire Vertical Surround-Gate Field-Effect Transistor

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