Macrocycle Network-Aided Nanopatterning of Inorganic Resists on Silicon
Author:
Affiliation:
1. School of Basic Sciences, Indian Institute of Technology Mandi, Mandi, Himachal Pradesh 175005, India
2. School of Computing and Electrical Engineering, Indian Institute of Technology Mandi, Mandi, Himachal Pradesh 175005, India
Funder
Ministry of Electronics and Information technology
Council for Scientific and Industrial Research
Centre for Industrial Consultancy and Sponsored Research, Indian Institute of Technology Madras Chennai
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsanm.2c01321
Reference60 articles.
1. Studying the Mechanism of Hybrid Nanoparticle Photoresists: Effect of Particle Size on Photopatterning
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