Plasma-Enhanced Atomic Layer Deposition Assisted Low-Temperature Synthetic Routes to Rationally Designed Metastable c-Axis Aligned Hexagonal In-Zn-O-Reference-Cited by-同舟云学术

Plasma-Enhanced Atomic Layer Deposition Assisted Low-Temperature Synthetic Routes to Rationally Designed Metastable c-Axis Aligned Hexagonal In-Zn-O

Author:

Hong TaeHyun¹,Kim Hyeon Woo¹²,Kim Yoon-Seo¹,Jeong Hyun-Jun³,Cho Sung Beom⁴⁵^ORCID,Park Jin-Seong¹^ORCID

Affiliation:

1. Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea

2. Center of Materials Digitalization, Korea Institute of Ceramic Engineering and Technology (KICET), Jinju 52851, Republic of Korea

3. R&D Center, Samsung Display, Yongin 17113, Republic of Korea

4. Department of Materials Science and Engineering, Ajou University, Suwon 16499, Republic of Korea

5. Department of Energy Systems Research, Ajou University, Suwon 16499, Republic of Korea

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

Reference63 articles.

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