Compositionally engineered amorphous InZnO thin-film transistor with high mobility and stability via atmospheric pressure spatial atomic layer deposition
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Published:2024-05
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Volume:
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ISSN:1226-086X
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Container-title:Journal of Industrial and Engineering Chemistry
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language:en
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Short-container-title:Journal of Industrial and Engineering Chemistry
Author:
Lee Chi-HoonORCID,
Yoo Kwang Su,
Kim Dong-Gyu,
Park Chang-KyunORCID,
Park Jin-SeongORCID